Quantitative structural characterization of InAs/GaSb superlattices
نویسندگان
چکیده
Molecular beam epitaxy grown InAs/GaSb superlattices, containing InSb-like interfacial layers, were analyzed by a combination of x-ray diffraction XRD and structural refinement. The superlattice refinement from x rays SUPREX method determines with high accuracy the average thicknesses and d spacings of the individual InAs and GaSb layers in addition to standard structural parameters usually obtained by XRD, such as the modulation length periodicity , average out-of-plane interplanar spacings, and total thickness. The combined SUPREX/XRD experiments show that the absence of certain odd order satellite features in the x-ray data is due to asymmetric and inhomogeneous lattice strain. © 2006 American Institute of Physics. DOI: 10.1063/1.2353732
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